Scottish Microelectronics Centre

The SMC infrastructure provides extensive cleanroom facilities with the bandwidth to undertake research requiring access to smart microsystems technology as well as an environment which can host staff from collaborating industries. The SMC is located in a purpose built facility at the University of Edinburgh's Science and Engineering campus at King's Buildings and consists of approximately 300m2 of class 10 and 250m2 of class 1,000-10,000 cleanrooms and 1000m2 of office and laboratory space. Over 250m2 of the office and laboratory space in the building is available for rent to commercial organisations with the Institute for Integrated Micro and Nano Systems from the School of Engineering occupying the rest.

The SMC is one of a very small number of Centres in the UK with access to a comprehensive toolset for processing 200mm silicon wafers, the substrate size used in the majority of industrial cleanrooms. The associated process and metrology equipment is largely located in the class 10 cleanrooms and the facilities available at the SMC are more than capable of post processing sub-micron CMOS as well as fabricating a wide-ranging set of non-silicon based microsystems. The SMC supports may collaborative research projects as well as providing process related services to both academia and industry. For interested parties details on the SMC fabrication and metrology equipment is available.

The SMC is involved in major interactions with industry as well as numerous spin-out activities. The SMC has a significant commercial turnover and is recognised as a leading centre for research and development with a number of companies located within the Centre. The SMC provides the R&D expertise necessary to integrate the many technologies capable of enhancing existing mainstream electronic products and the staff have the entrepreneurial track record to spin out both technologies and products.

Address: 

Scottish Microelectronics Centre
School of Engineering
The University of Edinburgh
Kings Buildings
Edinburgh,EH9 3JF

Tel:0131 650 5620

Fax:0131 650 7475

The Scottish Microelectronics Centre at the University of Edinburgh
The Scottish Microelectronics Centre at the University of Edinburgh
Nikon i-line stepper and CEE photoresist coater systems for sub-micron photolithography on 200mm substrates
Nikon i-line stepper and CEE photoresist coater systems for sub-micron photolithography on 200mm substrates
Advanced 200mm cluster tool for thin film deposition
Advanced 200mm cluster tool for thin film deposition

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