Professor and Head of Research Institute Email r.cheung@ed.ac.uk Telephone +44(0)131 6505749 Location 1.06 Scottish Microelectronics Centre Social Media http://www.researcherid.com/rid/A-9479-2019 https://orcid.org/0000-0002-2656-5646 Engineering Discipline Electronics and Electrical Engineering Research Institutes Integrated Micro and Nano Systems Research Publications Biography Rebecca Cheung received her secondary and tertiary education in Scotland. After obtaining a first class honours degree in Electronics and Electrical Engineering from the University of Glasgow, she was awarded a Scholarship from the Croucher Foundation to study towards a Ph.D, which she received from the same University in 1990. During her Ph.D, she was a visiting researcher with the Semiconductor Technology Group at IBM Thomas J. Watson Research Centre in Yorktown Heights, USA, where high density plasma etching techniques were developed for GaAs nanostructures. The process-induced material damage was characterised using x-ray photoelectron spectroscopy and quantum transport techniques. Professor Cheung joined the University of Edinburgh in 2000 and her current research interests include Silicon Carbide Microelectromechanical Systems, Biomimetical Systems and Graphene. She is funded by EPSRC and Scottish Enterprise to develop fabrication processes and technologies for the production of microelectromechanical systems in silicon carbide; as well as a multi-channel biomimetical system consisting of an array of resonating gate transistors integrated with neural electronics for mimicking the cochlea. Previously, Professor Cheung had been a visiting scientist with the Mesoscopic Physics Group in the Department of Applied Physics at Delft Institute of Microelectronics and Submicron Technology, The Netherlands; the Semiconductor Technology Group at the Laboratory for Electromagnetic Fields and Microwave Electronics, ETHZ, Switzerland and the Nanoelectronics Research Center at Glasgow, working on various topics related to semiconductor technology, process-induced materials damage in GaAs nanostructures, mesoscopic physics in SiGe heterostructures and microwave circuits in InP for gigabit electronics. Additionally, she had been a founding member of the "Nanostructure Engineering Science and Technology" (NEST) Group at the University of Canterbury in New Zealand in 1998, with research funding from the prestigious Marsden Fund administered by the Royal Society of New Zealand for the research programme "Science and Engineering of Nanostructures and Devices". Professor Cheung serves on numerous conference committees and scientific panels. She had been elected a Fellow of the Royal Society of Edinburgh in 2012, is a senior member of the IEEE, a Fellow of the IET and is an Honorary Professor with the School of Engineering and Physical Sciences at Heriot-Watt University. In 2013, Professor Cheung served as Program Chair for the 57th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication (EIPBN), the premier conference on the science and technology of nanopatterning; and now serves in the conference advisory committee. Academic Qualifications BSc in E&E Eng (1st class honours), PhD, both from the University of Glasgow Professional Qualifications and Memberships FRSE, FIET, SMIEEE Teaching Bioelectronics, Microelectronic Devices, Nanotechnology, Analogue Electronics, Microsystems Group Design Project Specialities MEMS, Nanoelectronics Further Information Present members Yun Jiang Dexiang Zhang Jacob Wang Rasool Siddiqui Past members Dr Liudi Jiang - Professor, School of Engineering Sciences, University of Southampton Dr Natalie Plank - Senior Lecturer in Physics, Victoria University of Wellington, New Zealand Dr Stefan Enderling - Australia Louise Teo - Germany Ian Bright - Australia Dr Tongtong Zhu - University of Cambridge Dr Petros Argyrakis - Greece Dr Kin Kiong Lee - University of Melbourne, Australia Shah Baten - Imperial College London Dr Carolina Mateo Segura - Lecturer, Heriot-Watt University Dr Philippa Parmiter - Scottish Carbon Capture and Storage, Edinburgh Isaac Gual - Intesis, Spain Dr Damien Thuau - Associate Professor, University of Bordeaux, France Dr Juan Jose Sanz-Fernandez - European Space Agency, The Netherlands Dr Rhonira Latif - Senior Lecturer, The National University of Malaysia, Malaysia Dr Boris Svilicic - Professor, Department of Marine Electronics and Communications, University of Rijeka, Croatia Dr Enrico Mastropaolo - Senior Lecturer, School of Engineering, University of Edinburgh, Scotland - sadly deceased Dr Tao Chen - Professor, University of Science and Technology of China, Anhui, China Eldad Grady - Technical University of Eindhoven, The Netherlands Dr Shiwei Wang - Reader, University of Edinburgh Dr Christian Nunez Alvarez - Keysight Technologies Inc., US Dr Rui Zhang - Research Fellow, Condensed Matter Physics group, University of Manchester Dr Asa'ad Al-masha'al - Lecturer, University of Basrah, Iraq Dr Graham Wood - Process Engineer, Scottish Microelectronics Centre, University of Edinburgh Dr Karina Jeronimo Martinez - Process Engineer, Newport Wafer Fab, Cardiff, Wales Behzad Jazizadeh - University of Warwick, UK Dr Yulin Geng - Research Associate, Jingjinji National Center of Technology Innovation Dr Jing Xu - Research Associate, Microphone Company in Edinburgh Dr Ammar Bin Che Mahzan - Canada Dr Stephen Mbisike - Power Company in Warwick ********************************************************************************************************* Beyond science and engineering, I play Schubert, Chopin, Beethoven, Bach, Händel etc...