The Institute for Integrated Micro and Nano Systems (IMNS) brings the technology and applications of micro-electro mechanical systems (MEMS), micro- and nano-fabrication, micro- and nano-electronics & photonics together with researchers working on integrated circuit and system-on-chip design to create smart micro- and nano-systems. The R&D portfolio covers the complete spectrum from design through to fabrication including the in-house capability to post-process foundry wafers to create more than Moore systems and deploy them in a broad range of applications. Recent strategic capital investments include a maskless lithography tool, deep etch technology for through silicon vias, wafer thinning equipment and resist spray coating units, as well as being the first facility in the UK to install the Heidelberg Nano (formerly SwissLitho) NanoFrazor Explore nanolithography tool. The latter acquisition will extend current research in microelectronics and open up new avenues of research with applications in, for example, biomedical, biomimetic, quantum, energy and advanced computation.
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